High-resolution near-field optical imaging with microfabricated probes is demonstrated. The probes are made from solid quartz tips fabricated at the end of silicon cantilevers and covered with a 60-nm-thick aluminum film. Transmission electron micrographs indicate a continuous aluminum layer at the tip apex. A specially designed instrument combines the advantages of near-field optical and beam-deflection force microscopy. Near-field optical data of latex bead projection patterns in transmission and of single fluorophores have been obtained in constant-height imaging mode. An artifact-free optical resolution of 31.7Â±3.6 nm has been deduced from full width at half maximum values of single molecule images.
|Translated title of the contribution||Near-field fluorescence imaging with 32 nm resolution based on microfabricated cantilevered probes|
|Pages (from-to)||3695 - 3697|
|Number of pages||3|
|Journal||Applied Physics Letters|
|Publication status||Published - 4 Dec 2000|