Near-field optical microscopy based on microfabricated probes

R Eckert, JM Freyland, H Gersen, H Heinzelmann, G Schurmann

Research output: Contribution to journalArticle (Academic Journal)peer-review

13 Citations (Scopus)


We demonstrate high resolution imaging with microfabricated, cantilevered probes, consisting of solid quartz tips on silicon levers. The tips are covered by a 60-nm thick layer of aluminium, which appears to be closed at the apex when investigated by transmission electron microscopy. An instrument specifically built for cantilever probes was used to record images of latex bead projection patterns in transmission as well as single molecule fluorescence. All images were recorded in constant height mode and show optical resolutions down to 32 nm.
Translated title of the contributionNear-field optical microscopy based on microfabricated probes
Original languageEnglish
Pages (from-to)7 - 11
Number of pages5
JournalJournal of Microscopy
Volume202 (1)
Publication statusPublished - Apr 2001

Bibliographical note

Publisher: Royal Microscopical Society


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