Observation of crystal distortions in SiGe/Si superlattice using a new application of large angle convergent beam electron diffraction

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Translated title of the contribution	Observation of crystal distortions in SiGe/Si superlattice using a new application of large angle convergent beam electron diffraction
Original language	English
Pages (from-to)	435 - 440
Journal	Ultramicroscopy
Volume	58
Publication status	Published - 1995

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@article{d48ccc96399f4cf0acfa0693213a2334,

title = "Observation of crystal distortions in SiGe/Si superlattice using a new application of large angle convergent beam electron diffraction",

author = "Y Atici and D Cherns",

year = "1995",

language = "English",

volume = "58",

pages = "435 -- 440",

journal = "Ultramicroscopy",

issn = "1879-2723",

publisher = "Elsevier B.V.",

}