Optical emission spectroscopic studies of microwave enhanced diamond CVD using CH4/CO2 plasmas

MA Elliott, PW May, J Petherbridge, SM Leeds, MNR Ashfold, WN Wang

Research output: Contribution to journalArticle (Academic Journal)peer-review

Translated title of the contributionOptical emission spectroscopic studies of microwave enhanced diamond CVD using CH4/CO2 plasmas
Original languageEnglish
Pages (from-to)311 - 316
JournalDiamond Relat. Mater
Volume9
Publication statusPublished - 2000

Bibliographical note

Publisher: Elsevier Science

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