Optical emission spectroscopic studies of microwave enhanced diamond CVD using CH4/CO2 plasmas

Optical emission spectroscopic studies of microwave enhanced diamond CVD using CH₄/CO₂ plasmas

MA Elliott, PW May, J Petherbridge, SM Leeds, MNR Ashfold, WN Wang

Research output: Contribution to journal › Article (Academic Journal) › peer-review

Translated title of the contribution	Optical emission spectroscopic studies of microwave enhanced diamond CVD using CH₄/CO₂ plasmas
Original language	English
Pages (from-to)	311 - 316
Journal	Diamond Relat. Mater
Volume	9
Publication status	Published - 2000

Publisher: Elsevier Science

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title = "Optical emission spectroscopic studies of microwave enhanced diamond CVD using CH4/CO2 plasmas",

author = "MA Elliott and PW May and J Petherbridge and SM Leeds and MNR Ashfold and WN Wang",

note = "Publisher: Elsevier Science",

year = "2000",

language = "English",

volume = "9",

pages = "311 -- 316",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier",

}

TY - JOUR

T1 - Optical emission spectroscopic studies of microwave enhanced diamond CVD using CH4/CO2 plasmas

AU - Elliott, MA

AU - May, PW

AU - Petherbridge, J

AU - Leeds, SM

AU - Ashfold, MNR

AU - Wang, WN

N1 - Publisher: Elsevier Science

PY - 2000

Y1 - 2000

M3 - Article (Academic Journal)

VL - 9

SP - 311

EP - 316

JO - Diamond and Related Materials

JF - Diamond and Related Materials

SN - 0925-9635

ER -