Translated title of the contribution | Optical emission spectroscopic studies of microwave enhanced diamond CVD using CH4/CO2 plasmas |
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Original language | English |
Pages (from-to) | 311 - 316 |
Journal | Diamond Relat. Mater |
Volume | 9 |
Publication status | Published - 2000 |
Optical emission spectroscopic studies of microwave enhanced diamond CVD using CH4/CO2 plasmas
MA Elliott, PW May, J Petherbridge, SM Leeds, MNR Ashfold, WN Wang
Research output: Contribution to journal › Article (Academic Journal) › peer-review