Abstract
The formation of nanopipes in GaN has been linked to impurity segregation. In this paper, a combination of high angle annular dark field imaging and electron energy loss spectroscopy in the Daresbury SuperSTEM is used to investigate the core structure and composition of open core dislocations (nanopipes) in GaN films grown by hydride vapour phase epitaxy. The results show evidence for segregation of oxygen to the nanopipe surfaces. Quantitative analysis suggests that up to several monolayers of nitrogen can be replaced by oxygen. The implications of these results for understanding the electrical properties and core structure of dislocations in GaN are discussed.
Translated title of the contribution | Oxygen segregation to nanopipes in gallium nitride |
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Original language | English |
Title of host publication | Microscopy of Semiconducting Materials |
Subtitle of host publication | Proceedings of the 14th Conference, April 11–14, 2005, Oxford, UK |
Publisher | Springer Berlin Heidelberg |
Pages | 45 - 51 |
Number of pages | 6 |
DOIs | |
Publication status | Published - 2005 |
Publication series
Name | Springer Proceedings in Physics |
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Volume | 107 |
Bibliographical note
Editors: Cullis AG, Hutchison JLPublisher: Springer-Verlag, Berlin
Name and Venue of Conference: Int. Conf. on Microscopy of Semiconducting Materials, 11-14 April 2005
Conference Organiser: Royal Microscop Soc; Inst. Phys, Elect. Microscopy & Anal. Grp; Mat Res Soc