Pattern formation on silicon by laser-initiated liquid-assisted colloidal lithography

M. Ulmeanu, P. Petkov, D. Ursescu, V. A. Maraloiu, F. Jipa, E. Brousseau, M. N R Ashfold

Research output: Contribution to journalArticle (Academic Journal)peer-review

3 Citations (Scopus)


We report sub-diffraction limited patterning of Si substrate surfaces by laser-initiated liquid-assisted colloidal lithography. The technique involves exposing a two-dimensional lattice of transparent colloidal particles spin coated on the substrate of interest (here Si) immersed in a liquid (e.g. methanol, acetone, carbon tetrachloride, toluene) to a single picosecond pulse of ultraviolet laser radiation. Surface patterns formed using colloidal particles with different radii in the range 195 nm ≤ R ≤ 1.5 μm and liquids with differing indices of refraction (n liquid) are demonstrated, the detailed topographies of which are sensitively dependent upon whether the index of refraction of the colloidal particle (n colloid) is greater or smaller than n liquid (i.e. upon whether the incident light converges or diverges upon interaction with the particle). The spatial intensity modulation formed by diffraction of the single laser pulse by the colloidal particles is imprinted into the Si substrate.

Original languageEnglish
Article number455303
Issue number45
Publication statusPublished - 21 Oct 2015


  • diffraction of the laser beam on the colloidal particles
  • laser-initiated liquid-assisted colloidal lithography
  • Si patterning

Fingerprint Dive into the research topics of 'Pattern formation on silicon by laser-initiated liquid-assisted colloidal lithography'. Together they form a unique fingerprint.

Cite this