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Profiling of GeSi/Si strained layer superlattices by large angle convergent beam electron diffraction and electron holography

  • X-F Duan
  • , PN Grigorieff
  • , D Cherns
  • , JW Steeds
  • , C Sheng

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

Translated title of the contributionProfiling of GeSi/Si strained layer superlattices by large angle convergent beam electron diffraction and electron holography
Original languageEnglish
Title of host publicationUnknown
Pages513 - 516
Number of pages3
Volume134
Publication statusPublished - 1993

Bibliographical note

Conference Proceedings/Title of Journal: Inst. Phys. Conf. Ser

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