Proton exchange and diffusion in LiNbO3 using inductance coupled high density plasma

Z Ren, PJ Heard, S Yu

Research output: Contribution to journalArticle (Academic Journal)peer-review

4 Citations (Scopus)
Translated title of the contributionProton exchange and diffusion in LiNbO3 using inductance coupled high density plasma
Original languageEnglish
Pages (from-to)1161 - 1165
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume25(4)
DOIs
Publication statusPublished - Jul 2007

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