Proton exchange and diffusion in LiNbO3 using inductance coupled high density plasma

Z Ren, PJ Heard, S Yu

Research output: Contribution to journal › Article (Academic Journal) › peer-review

5 Citations (Scopus)

Translated title of the contribution	Proton exchange and diffusion in LiNbO3 using inductance coupled high density plasma
Original language	English
Pages (from-to)	1161 - 1165
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	25(4)
DOIs	https://doi.org/10.1116/1.2746052
Publication status	Published - Jul 2007

Access to Document

@article{cc2634d424844302871f5b54a8153fde,

title = "Proton exchange and diffusion in LiNbO3 using inductance coupled high density plasma",

author = "Z Ren and PJ Heard and S Yu",

year = "2007",

month = jul,

doi = "10.1116/1.2746052",

language = "English",

volume = "25(4)",

pages = "1161 -- 1165",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

}

TY - JOUR

T1 - Proton exchange and diffusion in LiNbO3 using inductance coupled high density plasma

AU - Ren, Z

AU - Heard, PJ

AU - Yu, S

PY - 2007/7

Y1 - 2007/7

U2 - 10.1116/1.2746052

DO - 10.1116/1.2746052

M3 - Article (Academic Journal)

SN - 1071-1023

VL - 25(4)

SP - 1161

EP - 1165

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

ER -