Proton exchange and diffusion in LiNbO3 using inductance coupled high density plasma

Z Ren, PJ Heard, S Yu

Research output: Contribution to journal › Article (Academic Journal) › peer-review

5 Citations (Scopus)

Original language	English
Pages (from-to)	1161 - 1165
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	25(4)
DOIs	https://doi.org/10.1116/1.2746052
Publication status	Published - Jul 2007

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NOVEL FERROELECTRIC PHOTONIC BAND GAP STRUCTURES
Yu, S. (Principal Investigator)
1/07/06 → 1/07/07
Project: Research

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title = "Proton exchange and diffusion in LiNbO3 using inductance coupled high density plasma",

author = "Z Ren and PJ Heard and S Yu",

year = "2007",

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language = "English",

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journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

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T1 - Proton exchange and diffusion in LiNbO3 using inductance coupled high density plasma

AU - Ren, Z

AU - Heard, PJ

AU - Yu, S

PY - 2007/7

Y1 - 2007/7

U2 - 10.1116/1.2746052

DO - 10.1116/1.2746052

M3 - Article (Academic Journal)

SN - 1071-1023

VL - 25(4)

SP - 1161

EP - 1165

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

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