Pushing the boundaries of local oxidation nanolithography: Short timescales and high speeds

JA Vicary, MJ Miles

Research output: Contribution to journalArticle (Academic Journal)peer-review

24 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Pushing the boundaries of local oxidation nanolithography: Short timescales and high speeds'. Together they form a unique fingerprint.

Engineering

Material Science