Raman spectroscopy of GaN, AlGaN and AlN for process and growth monitoring/control

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Translated title of the contribution	Raman spectroscopy of GaN, AlGaN and AlN for process and growth monitoring/control
Original language	English
Pages (from-to)	987 - 999
Journal	Surf. Interface Anal
Volume	31
Publication status	Published - 2001

Publisher: John Wiley & Sons

Structured keywords

@article{9ccbe6dfe81b4d5290fbb876d93c2f53,

title = "Raman spectroscopy of GaN, AlGaN and AlN for process and growth monitoring/control",

author = "MHH Kuball",

note = "Publisher: John Wiley & Sons",

year = "2001",

language = "English",

volume = "31",

pages = "987 -- 999",

journal = "Surface and Interface Analysis",

issn = "0142-2421",

publisher = "John Wiley & Sons, Inc",

}