Raman spectroscopy of GaN, AlGaN and AlN for process and growth monitoring/control

Research output: Contribution to journalArticle (Academic Journal)peer-review

299 Citations (Scopus)
Translated title of the contributionRaman spectroscopy of GaN, AlGaN and AlN for process and growth monitoring/control
Original languageEnglish
Pages (from-to)987 - 999
JournalSurf. Interface Anal
Volume31
Publication statusPublished - 2001

Bibliographical note

Publisher: John Wiley & Sons

Structured keywords

  • CDTR

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