Real-time nanofabrication with high-speed atomic force microscopy

JA Vicary, MJ Miles

Research output: Contribution to journalArticle (Academic Journal)peer-review

34 Citations (Scopus)

Abstract

The ability to follow nanoscale processes in real-time has obvious benefits for the future of material science. In particular, the ability to evaluate the success of fabrication processes in situ would be an advantage for many in the semiconductor industry. We report on the application of a previously described high-speed atomic force microscope (AFM) for nanofabrication. The specific fabrication method presented here concerns the modification of a silicon surface by locally oxidizing the region in the vicinity of the AFM tip. Oxide features were fabricated during imaging, with relative tip-sample velocities of up to 10 cm s(-1), and with a data capture rate of 15 fps.
Translated title of the contributionReal-time nanofabrication with high-speed atomic force microscopy
Original languageEnglish
Article numberArticle Number: 095302
JournalNanotechnology
Volume20
DOIs
Publication statusPublished - 2009

Bibliographical note

Publisher: IOP publishing

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