Reevaluation of the mechanism for ultrananocrystalline diamond deposition from Ar/CH4/H2 gas mixtures

Reevaluation of the mechanism for ultrananocrystalline diamond deposition from Ar/CH₄/H₂ gas mixtures

PW May, JN Harvey, JA Smith, YA Mankelevich

Research output: Contribution to journal › Article (Academic Journal) › peer-review

94 Citations (Scopus)

Translated title of the contribution	Reevaluation of the mechanism for ultrananocrystalline diamond deposition from Ar/CH₄/H₂ gas mixtures
Original language	English
Pages (from-to)	104907:1 - 104907:11
Number of pages	11
Journal	Journal of Applied Physics
Volume	99 (10)
DOIs	https://doi.org/10.1063/1.2195347
Publication status	Published - May 2006

Publisher: American Institute of Physics

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title = "Reevaluation of the mechanism for ultrananocrystalline diamond deposition from Ar/CH4/H2 gas mixtures",

author = "PW May and JN Harvey and JA Smith and YA Mankelevich",

note = "Publisher: American Institute of Physics",

year = "2006",

month = may,

doi = "10.1063/1.2195347",

language = "English",

volume = "99 (10)",

pages = "104907:1 -- 104907:11",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics (AIP)",

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TY - JOUR

T1 - Reevaluation of the mechanism for ultrananocrystalline diamond deposition from Ar/CH4/H2 gas mixtures

AU - May, PW

AU - Harvey, JN

AU - Smith, JA

AU - Mankelevich, YA

N1 - Publisher: American Institute of Physics

PY - 2006/5

Y1 - 2006/5

U2 - 10.1063/1.2195347

DO - 10.1063/1.2195347

M3 - Article (Academic Journal)

SN - 0021-8979

VL - 99 (10)

SP - 104907:1 - 104907:11

JO - Journal of Applied Physics

JF - Journal of Applied Physics

ER -