Reevaluation of the mechanism for ultrananocrystalline diamond deposition from Ar/CH4/H2 gas mixtures

PW May, JN Harvey, JA Smith, YA Mankelevich

Research output: Contribution to journalArticle (Academic Journal)peer-review

87 Citations (Scopus)
Translated title of the contributionReevaluation of the mechanism for ultrananocrystalline diamond deposition from Ar/CH4/H2 gas mixtures
Original languageEnglish
Pages (from-to)104907:1 - 104907:11
Number of pages11
JournalJournal of Applied Physics
Volume99 (10)
DOIs
Publication statusPublished - May 2006

Bibliographical note

Publisher: American Institute of Physics

Cite this