Resonant, High-Frequency Acousto-Optic Modulators (AOM) Fabricated in a MEMS Foundry Platform

Stefano Valle, Krishna C. Balram

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

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Abstract

We report the design and characterization of high frequency, resonant acousto-optic modulators in a MEMS foundry process. The doubly-resonant cavity design allows us to measure acousto-optic modulation at frequencies upto 4 GHz with high modulation efficiency (\mathrm{V}-{\pi}\approx 350\text{mV}, \mathrm{f}-{res}\approx 2 \text{GHz}).

Original languageEnglish
Title of host publication2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Number of pages2
ISBN (Electronic)9781943580576
DOIs
Publication statusPublished - 1 Jul 2019
Event2019 Conference on Lasers and Electro-Optics, CLEO 2019 - San Jose, United States
Duration: 5 May 201910 May 2019

Publication series

Name2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings
PublisherIEEE
ISSN (Print)2160-8989

Conference

Conference2019 Conference on Lasers and Electro-Optics, CLEO 2019
CountryUnited States
CitySan Jose
Period5/05/1910/05/19

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