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Resonant, High-Frequency Acousto-Optic Modulators (AOM) Fabricated in a MEMS Foundry Platform

  • Stefano Valle
  • , Krishna C. Balram

    Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

    355 Downloads (Pure)

    Abstract

    We report the design and characterization of high frequency, resonant acousto-optic modulators in a MEMS foundry process. The doubly-resonant cavity design allows us to measure acousto-optic modulation at frequencies upto 4 GHz with high modulation efficiency (\mathrm{V}-{\pi}\approx 350\text{mV}, \mathrm{f}-{res}\approx 2 \text{GHz}).

    Original languageEnglish
    Title of host publication2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings
    PublisherInstitute of Electrical and Electronics Engineers (IEEE)
    Number of pages2
    ISBN (Electronic)9781943580576
    DOIs
    Publication statusPublished - 1 Jul 2019
    Event2019 Conference on Lasers and Electro-Optics, CLEO 2019 - San Jose, United States
    Duration: 5 May 2019 → 10 May 2019

    Publication series

    Name2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings
    PublisherIEEE
    ISSN (Print)2160-8989

    Conference

    Conference2019 Conference on Lasers and Electro-Optics, CLEO 2019
    Country/TerritoryUnited States
    CitySan Jose
    Period5/05/19 → 10/05/19

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