Robustness of nano-electromechanical switches against mechanical shock and vibration loads

Nano-electromechanical (NEM) switches offer significant potential for future computing and memory applications due to their low power consumption and ability to operate in high-temperature and radiation-harsh environments. However, there is a lack of studies on the robustness of NEM switches under mechanical loads. In this study, we investigated the performance of 3- and 7-terminal NEM relays under mechanical shocks up to 5000 g and vibrations up to 70 g. The results demonstrate that devices maintain mechanical functionality, with some variations in the electrical characteristics. These findings underscore the potential of NEMS technology for reliable operation in harsh environments, paving the way for their possible integration into next-generation electronic devices.