Scaled silicon nanoelectromechanical (NEM) hybrid systems

Hiroshi Mizuta; Mario A. Garcia-Ramirez; Faezeh Arab Hassani; Mohammad A. Ghiass; Nima Kalhor; Zakaria Moktadir; Yoshishige Tsuchiya; Shunichiro Sawai; Jun Ogi; Shunri Oda

doi:10.1109/ICSICT.2010.5667601

Scaled silicon nanoelectromechanical (NEM) hybrid systems

Hiroshi Mizuta^*, Mario A. Garcia-Ramirez, Faezeh Arab Hassani, Mohammad A. Ghiass, Nima Kalhor, Zakaria Moktadir, Yoshishige Tsuchiya, Shunichiro Sawai, Jun Ogi, Shunri Oda

^*Corresponding author for this work

Department of Electrical & Electronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

Abstract

In this paper we overview recent attempts at co-integrating silicon nano-electro-mechanical systems (NEMS) with nanoelectronic devices aiming to add more functionalities to conventional electronic devices in 'More-than-Moore' domain and also explore novel operating principles in 'Beyond CMOS' domain.

Original language	English
Title of host publication	ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings
Place of Publication	Shanghai, China
Pages	1198-1201
Number of pages	4
DOIs	https://doi.org/10.1109/ICSICT.2010.5667601
Publication status	Published - 2010
Event	2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology - Shanghai, China Duration: 1 Nov 2010 → 4 Nov 2010

Publication series

Name	ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings

Conference

Conference	2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology
Country/Territory	China
City	Shanghai
Period	1/11/10 → 4/11/10

Bibliographical note

Copyright:
Copyright 2011 Elsevier B.V., All rights reserved.

Structured keywords

Photonics and Quantum

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10.1109/ICSICT.2010.5667601

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Mizuta, H., Garcia-Ramirez, M. A., Arab Hassani, F., Ghiass, M. A., Kalhor, N., Moktadir, Z., Tsuchiya, Y., Sawai, S., Ogi, J., & Oda, S. (2010). Scaled silicon nanoelectromechanical (NEM) hybrid systems. In ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings (pp. 1198-1201). [5667601] (ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings).. https://doi.org/10.1109/ICSICT.2010.5667601

Mizuta, Hiroshi ; Garcia-Ramirez, Mario A. ; Arab Hassani, Faezeh et al. / Scaled silicon nanoelectromechanical (NEM) hybrid systems. ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings. Shanghai, China, 2010. pp. 1198-1201 (ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings).

@inproceedings{1e2fb3bd93784b68b379acb74a65bbee,

title = "Scaled silicon nanoelectromechanical (NEM) hybrid systems",

abstract = "In this paper we overview recent attempts at co-integrating silicon nano-electro-mechanical systems (NEMS) with nanoelectronic devices aiming to add more functionalities to conventional electronic devices in 'More-than-Moore' domain and also explore novel operating principles in 'Beyond CMOS' domain.",

author = "Hiroshi Mizuta and Garcia-Ramirez, {Mario A.} and {Arab Hassani}, Faezeh and Ghiass, {Mohammad A.} and Nima Kalhor and Zakaria Moktadir and Yoshishige Tsuchiya and Shunichiro Sawai and Jun Ogi and Shunri Oda",

note = "Copyright: Copyright 2011 Elsevier B.V., All rights reserved.; 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology ; Conference date: 01-11-2010 Through 04-11-2010",

year = "2010",

doi = "10.1109/ICSICT.2010.5667601",

language = "English",

isbn = "9781424457984",

series = "ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings",

pages = "1198--1201",

booktitle = "ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings",

}

Mizuta, H, Garcia-Ramirez, MA, Arab Hassani, F, Ghiass, MA, Kalhor, N, Moktadir, Z, Tsuchiya, Y, Sawai, S, Ogi, J & Oda, S 2010, Scaled silicon nanoelectromechanical (NEM) hybrid systems. in ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings., 5667601, ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings, Shanghai, China, pp. 1198-1201, 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Shanghai, China, 1/11/10. https://doi.org/10.1109/ICSICT.2010.5667601

Scaled silicon nanoelectromechanical (NEM) hybrid systems. / Mizuta, Hiroshi; Garcia-Ramirez, Mario A.; Arab Hassani, Faezeh et al.
ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings. Shanghai, China, 2010. p. 1198-1201 5667601 (ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

TY - GEN

T1 - Scaled silicon nanoelectromechanical (NEM) hybrid systems

AU - Mizuta, Hiroshi

AU - Garcia-Ramirez, Mario A.

AU - Arab Hassani, Faezeh

AU - Ghiass, Mohammad A.

AU - Kalhor, Nima

AU - Moktadir, Zakaria

AU - Tsuchiya, Yoshishige

AU - Sawai, Shunichiro

AU - Ogi, Jun

AU - Oda, Shunri

PY - 2010

Y1 - 2010

N2 - In this paper we overview recent attempts at co-integrating silicon nano-electro-mechanical systems (NEMS) with nanoelectronic devices aiming to add more functionalities to conventional electronic devices in 'More-than-Moore' domain and also explore novel operating principles in 'Beyond CMOS' domain.

AB - In this paper we overview recent attempts at co-integrating silicon nano-electro-mechanical systems (NEMS) with nanoelectronic devices aiming to add more functionalities to conventional electronic devices in 'More-than-Moore' domain and also explore novel operating principles in 'Beyond CMOS' domain.

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U2 - 10.1109/ICSICT.2010.5667601

DO - 10.1109/ICSICT.2010.5667601

M3 - Conference Contribution (Conference Proceeding)

AN - SCOPUS:78751539325

SN - 9781424457984

T3 - ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings

SP - 1198

EP - 1201

BT - ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings

CY - Shanghai, China

T2 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology

Y2 - 1 November 2010 through 4 November 2010

ER -

Mizuta H, Garcia-Ramirez MA, Arab Hassani F, Ghiass MA, Kalhor N, Moktadir Z et al. Scaled silicon nanoelectromechanical (NEM) hybrid systems. In ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings. Shanghai, China. 2010. p. 1198-1201. 5667601. (ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings). doi: 10.1109/ICSICT.2010.5667601

Scaled silicon nanoelectromechanical (NEM) hybrid systems

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