Scaled silicon nanoelectromechanical (NEM) hybrid systems

Hiroshi Mizuta*, Mario A. Garcia-Ramirez, Faezeh Arab Hassani, Mohammad A. Ghiass, Nima Kalhor, Zakaria Moktadir, Yoshishige Tsuchiya, Shunichiro Sawai, Jun Ogi, Shunri Oda

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

Abstract

In this paper we overview recent attempts at co-integrating silicon nano-electro-mechanical systems (NEMS) with nanoelectronic devices aiming to add more functionalities to conventional electronic devices in 'More-than-Moore' domain and also explore novel operating principles in 'Beyond CMOS' domain.

Original languageEnglish
Title of host publicationICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings
Place of PublicationShanghai, China
Pages1198-1201
Number of pages4
DOIs
Publication statusPublished - 2010
Event2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology - Shanghai, China
Duration: 1 Nov 20104 Nov 2010

Publication series

NameICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings

Conference

Conference2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology
CountryChina
CityShanghai
Period1/11/104/11/10

Bibliographical note

Copyright:
Copyright 2011 Elsevier B.V., All rights reserved.

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