Silicon-on-insulator material for sensors and accelerometers

DF Moore, J Daniel, SC Burgess, A Nakiyama, N Shibaike, T Kiriyama

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

Translated title of the contributionSilicon-on-insulator material for sensors and accelerometers
Original languageEnglish
Title of host publicationColloqium on Silicon Fabricated Inertial Instruments,London
Publication statusPublished - Dec 1996

Bibliographical note

Conference Organiser: IEE
Other identifier: Ref 1996/227

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