Silicon-on-insulator material for sensors and accelerometers

DF Moore, J Daniel, SC Burgess, A Nakiyama, N Shibaike, T Kiriyama

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

Translated title of the contribution	Silicon-on-insulator material for sensors and accelerometers
Original language	English
Title of host publication	Colloqium on Silicon Fabricated Inertial Instruments,London
Publication status	Published - Dec 1996

Conference Organiser: IEE
Other identifier: Ref 1996/227

Handle.net

@inproceedings{f3b7bf353df84d3aa259b82879120a29,

title = "Silicon-on-insulator material for sensors and accelerometers",

author = "DF Moore and J Daniel and SC Burgess and A Nakiyama and N Shibaike and T Kiriyama",

note = "Conference Organiser: IEE Other identifier: Ref 1996/227",

year = "1996",

month = dec,

language = "English",

booktitle = "Colloqium on Silicon Fabricated Inertial Instruments,London",

}

TY - GEN

T1 - Silicon-on-insulator material for sensors and accelerometers

AU - Moore, DF

AU - Daniel, J

AU - Burgess, SC

AU - Nakiyama, A

AU - Shibaike, N

AU - Kiriyama, T

N1 - Conference Organiser: IEE Other identifier: Ref 1996/227

PY - 1996/12

Y1 - 1996/12

M3 - Conference Contribution (Conference Proceeding)

BT - Colloqium on Silicon Fabricated Inertial Instruments,London

ER -