Simple multi-mask technique for fabrication of high resolution polymer structures

MA Cowin, RV Penty, IH White

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

1 Citation (Scopus)
Translated title of the contributionSimple multi-mask technique for fabrication of high resolution polymer structures
Original languageEnglish
Title of host publicationPhotonics West, San Jose
Publication statusPublished - 2000

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