Translated title of the contribution | Simple multi-mask technique for fabrication of high resolution polymer structures |
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Original language | English |
Title of host publication | Photonics West, San Jose |
Publication status | Published - 2000 |
Simple multi-mask technique for fabrication of high resolution polymer structures
MA Cowin, RV Penty, IH White
Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)
2
Citations
(Scopus)