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Simple multi-mask technique for fabrication of high resolution polymer structures

  • MA Cowin
  • , RV Penty
  • , IH White

    Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

    2 Citations (Scopus)
    Translated title of the contributionSimple multi-mask technique for fabrication of high resolution polymer structures
    Original languageEnglish
    Title of host publicationPhotonics West, San Jose
    Publication statusPublished - 2000

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