Simulations of chemical vapor despoition diamond film growth using a kinetic monte carlo model

P.W May, J.N Harvey, N.L Allan, J.C Richley, Y.A Mankelevich

Research output: Contribution to journalArticle (Academic Journal)peer-review

29 Citations (Scopus)
Translated title of the contributionSimulations of CVD Diamond Film Growth Using a Kinetic Monte Carlo Model
Original languageEnglish
Pages (from-to)1 - 13
Number of pages13
JournalJournal of Applied Physics
Volume108
Issue number1
DOIs
Publication statusPublished - Jul 2010

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