SiN x –Si interlayer coupler using a gradient index metamaterial

Pengfei Xu, Yanfeng Zhang*, Shuailong Zhang, Yujie Chen, Siyuan Yu

*Corresponding author for this work

Research output: Contribution to journalArticle (Academic Journal)peer-review

12 Citations (Scopus)


In this work, we demonstrate a metamaterial (MM)-based SiN x –Si interlayer coupler. A gradient index (GRIN) MM was employed to achieve refractive index matching, balancing the large difference in the refractive index between Si (∼3.42) and SiN x (∼2). In addition, a two-layer SiN x interlayer coupler was proposed to further minimize the coupling loss and interlayer crosstalk. Finally, we demonstrated a three-dimensional (3D) SiN x –Si interlayer coupler with the −0.6 dB insertion loss per layer propagation, with the 40 nm 1-dB-bandwidth (1530–1570 nm) and <−45 dB interlayer crosstalk. These promising results demonstrate the great potential of a GRIN MM-based SiN x –Si interlayer coupler in 3D photonic integration.

Original languageEnglish
Pages (from-to)1230-1233
Number of pages4
JournalOptics Letters
Issue number5
Early online date27 Feb 2019
Publication statusPublished - 1 Mar 2019


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