Small angle x-ray and neutron scattering studies of plasma-deposited amorphous silicon-hydrogen films

A. J. Leadbetter; A. A.M. Rashid; R. M. Richardson; A. F. Wright; J. C. Knights

doi:10.1016/0038-1098(80)90293-8

Small angle x-ray and neutron scattering studies of plasma-deposited amorphous silicon-hydrogen films

A. J. Leadbetter^*
, A. A.M. Rashid
, R. M. Richardson
, A. F. Wright
, J. C. Knights

^*Corresponding author for this work

School of Physics

Research output: Contribution to journal › Article (Academic Journal) › peer-review

45 Citations (Scopus)

Abstract

Small-angle scattering measurements using both neutrons and X-rays have been made on a series of plasma-deposited a-Si : H films. One class of sample exhibits strong anisotropic scattering indicating rod-like microstructure normal to the film surface with a dominant rod diameter of ~ 60 Å. Other samples show isotropic scattering with a similar dimension or no scattering at all within the resolution of the experiment.

Original language	English
Pages (from-to)	973-977
Number of pages	5
Journal	Solid State Communications
Volume	33
Issue number	9
DOIs	https://doi.org/10.1016/0038-1098(80)90293-8
Publication status	Published - 1 Jan 1980

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title = "Small angle x-ray and neutron scattering studies of plasma-deposited amorphous silicon-hydrogen films",

abstract = "Small-angle scattering measurements using both neutrons and X-rays have been made on a series of plasma-deposited a-Si : H films. One class of sample exhibits strong anisotropic scattering indicating rod-like microstructure normal to the film surface with a dominant rod diameter of \textasciitilde{} 60 {\AA}. Other samples show isotropic scattering with a similar dimension or no scattering at all within the resolution of the experiment.",

author = "Leadbetter, \{A. J.\} and Rashid, \{A. A.M.\} and Richardson, \{R. M.\} and Wright, \{A. F.\} and Knights, \{J. C.\}",

year = "1980",

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doi = "10.1016/0038-1098(80)90293-8",

language = "English",

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journal = "Solid State Communications",

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T1 - Small angle x-ray and neutron scattering studies of plasma-deposited amorphous silicon-hydrogen films

AU - Leadbetter, A. J.

AU - Rashid, A. A.M.

AU - Richardson, R. M.

AU - Wright, A. F.

AU - Knights, J. C.

PY - 1980/1/1

Y1 - 1980/1/1

N2 - Small-angle scattering measurements using both neutrons and X-rays have been made on a series of plasma-deposited a-Si : H films. One class of sample exhibits strong anisotropic scattering indicating rod-like microstructure normal to the film surface with a dominant rod diameter of ~ 60 Å. Other samples show isotropic scattering with a similar dimension or no scattering at all within the resolution of the experiment.

AB - Small-angle scattering measurements using both neutrons and X-rays have been made on a series of plasma-deposited a-Si : H films. One class of sample exhibits strong anisotropic scattering indicating rod-like microstructure normal to the film surface with a dominant rod diameter of ~ 60 Å. Other samples show isotropic scattering with a similar dimension or no scattering at all within the resolution of the experiment.

UR - https://www.scopus.com/pages/publications/0001633807

U2 - 10.1016/0038-1098(80)90293-8

DO - 10.1016/0038-1098(80)90293-8

M3 - Article (Academic Journal)

AN - SCOPUS:0001633807

SN - 0038-1098

VL - 33

SP - 973

EP - 977

JO - Solid State Communications

JF - Solid State Communications

IS - 9

ER -

Small angle x-ray and neutron scattering studies of plasma-deposited amorphous silicon-hydrogen films

Abstract

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