Spectroscopic studies of the reactive ion etching of gallium arsenide in

DF Klemperer, D Field, IT Wade

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

Translated title of the contribution	Spectroscopic studies of the reactive ion etching of gallium arsenide in
Original language	English
Title of host publication	Unknown
Pages	122 - 125
Number of pages	3
Volume	1991
Publication status	Published - 1991

Conference Proceedings/Title of Journal: 8th International Colloquium on Plasma Processes, Antibes, France

Handle.net

@inproceedings{0d391f7f779b47bb9ccffb1a90e2f5dd,

title = "Spectroscopic studies of the reactive ion etching of gallium arsenide in",

author = "DF Klemperer and D Field and IT Wade",

note = "Conference Proceedings/Title of Journal: 8th International Colloquium on Plasma Processes, Antibes, France",

year = "1991",

language = "English",

volume = "1991",

pages = "122 -- 125",

booktitle = "Unknown",

}