Studies on the reaction between silane and hydrogen peroxide vapour;  surface formation of planarized silica layers

MP Taylor, PL Timms

Research output: Contribution to journal › Article (Academic Journal) › peer-review

7 Citations (Scopus)

Translated title of the contribution	Studies on the reaction between silane and hydrogen peroxide vapour; surface formation of planarized silica layers
Original language	English
Pages (from-to)	1049 - 1053
Journal	Journal of the Chemical Society: Dalton Transactions
Publication status	Published - 1997

Handle.net

@article{9924ca778db24fe18e33e114bb1fbfab,

title = "Studies on the reaction between silane and hydrogen peroxide vapour; surface formation of planarized silica layers",

author = "MP Taylor and PL Timms",

year = "1997",

language = "English",

pages = "1049 -- 1053",

journal = "Journal of the Chemical Society: Dalton Transactions",

issn = "0300-9246",

publisher = "Royal Society of Chemistry",

}

TY - JOUR

T1 - Studies on the reaction between silane and hydrogen peroxide vapour; surface formation of planarized silica layers

AU - Taylor, MP

AU - Timms, PL

PY - 1997

Y1 - 1997

M3 - Article (Academic Journal)

SN - 0300-9246

SP - 1049

EP - 1053

JO - Journal of the Chemical Society: Dalton Transactions

JF - Journal of the Chemical Society: Dalton Transactions

ER -