Studies on the reaction between silane and hydrogen peroxide vapour; surface formation of planarized silica layers

MP Taylor, PL Timms

    Research output: Contribution to journalArticle (Academic Journal)

    6 Citations (Scopus)
    Translated title of the contributionStudies on the reaction between silane and hydrogen peroxide vapour; surface formation of planarized silica layers
    Original languageEnglish
    Pages (from-to)1049 - 1053
    JournalJournal of the Chemical Society: Dalton Transactions
    Publication statusPublished - 1997

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