Surface charge lithography for GaN micro- and nanostructuring

IM Tiginyanu, V Popa, A Sarua, PJ Heard, O Volciuc, M Kuball

Research output: Contribution to journalArticle (Academic Journal)peer-review

4 Citations (Scopus)
Translated title of the contributionSurface charge lithography for GaN micro- and nanostructuring
Original languageEnglish
JournalProceedings of SPIE
Volume7216
DOIs
Publication statusPublished - 2009

Bibliographical note

ISBN: 9780819474629
Name and Venue of Conference: Gallium nitride materials and devices
Name and Venue of Event: Gallium nitride materials and devices, San Jose, CA, 2009
Conference Organiser: INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING

Structured keywords

  • CDTR

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