Surface charge lithography for GaN micro- and nanostructuring

IM Tiginyanu; V Popa; A Sarua; PJ Heard; O Volciuc; M Kuball

doi:10.1117/12.803679

Surface charge lithography for GaN micro- and nanostructuring

IM Tiginyanu
, V Popa
, A Sarua
, PJ Heard
, O Volciuc
, M Kuball

Research output: Contribution to journal › Article (Academic Journal) › peer-review

4 Citations (Scopus)

Translated title of the contribution	Surface charge lithography for GaN micro- and nanostructuring
Original language	English
Journal	Proceedings of SPIE
Volume	7216
DOIs	https://doi.org/10.1117/12.803679
Publication status	Published - 2009

Bibliographical note

ISBN: 9780819474629
Name and Venue of Conference: Gallium nitride materials and devices
Name and Venue of Event: Gallium nitride materials and devices, San Jose, CA, 2009
Conference Organiser: INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING

Research Groups and Themes

CDTR

Access to Document

10.1117/12.803679

Handle.net

Persistent link

FEI FIB201
Hallam, K. R.
University of Bristol
Facility/equipment: Equipment

Cite this

@article{4b10c9516c4543a685a9ea1d52ae42cb,

title = "Surface charge lithography for GaN micro- and nanostructuring",

author = "IM Tiginyanu and V Popa and A Sarua and PJ Heard and O Volciuc and M Kuball",

note = "ISBN: 9780819474629 Name and Venue of Conference: Gallium nitride materials and devices Name and Venue of Event: Gallium nitride materials and devices, San Jose, CA, 2009 Conference Organiser: INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING",

year = "2009",

doi = "10.1117/12.803679",

language = "English",

volume = "7216",

journal = "Proceedings of SPIE",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - Surface charge lithography for GaN micro- and nanostructuring

AU - Tiginyanu, IM

AU - Popa, V

AU - Sarua, A

AU - Heard, PJ

AU - Volciuc, O

AU - Kuball, M

N1 - ISBN: 9780819474629 Name and Venue of Conference: Gallium nitride materials and devices Name and Venue of Event: Gallium nitride materials and devices, San Jose, CA, 2009 Conference Organiser: INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING

PY - 2009

Y1 - 2009

U2 - 10.1117/12.803679

DO - 10.1117/12.803679

M3 - Article (Academic Journal)

SN - 0277-786X

VL - 7216

JO - Proceedings of SPIE

JF - Proceedings of SPIE

ER -

Surface charge lithography for GaN micro- and nanostructuring

Bibliographical note

Research Groups and Themes

Access to Document

Handle.net

Equipment

FEI FIB201

Cite this