Surface charge lithography for GaN nano-scale device fabrication

A Sarua, TA Schuller, M Kuball, V Popa, O Volciuc, IM Tiginyanu, PJ Heard, J Das, S Degroote, M Germain

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

Translated title of the contribution	Surface charge lithography for GaN nano-scale device fabrication
Original language	English
Title of host publication	2nd International Workshop on FIB for Photonics, Cambridge, UK
Publication status	Published - Apr 2010

Conference Organiser: IEEE

Structured keywords

MOLD-ERA FP7 EU project
Andrei Sarua (Contributor)
Oct 2010 → Mar 2013
Activity: Other activity types › - Research and Teaching at External Organisation

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title = "Surface charge lithography for GaN nano-scale device fabrication",

author = "A Sarua and TA Schuller and M Kuball and V Popa and O Volciuc and IM Tiginyanu and PJ Heard and J Das and S Degroote and M Germain",

note = "Conference Organiser: IEEE",

year = "2010",

month = apr,

language = "English",

booktitle = "2nd International Workshop on FIB for Photonics, Cambridge, UK",

}

TY - GEN

T1 - Surface charge lithography for GaN nano-scale device fabrication

AU - Sarua, A

AU - Schuller, TA

AU - Kuball, M

AU - Popa, V

AU - Volciuc, O

AU - Tiginyanu, IM

AU - Heard, PJ

AU - Das, J

AU - Degroote, S

AU - Germain, M

N1 - Conference Organiser: IEEE

PY - 2010/4

Y1 - 2010/4

M3 - Conference Contribution (Conference Proceeding)

BT - 2nd International Workshop on FIB for Photonics, Cambridge, UK

ER -