Surface charge lithography for GaN nano-scale device fabrication

A Sarua, TA Schuller, M Kuball, V Popa, O Volciuc, IM Tiginyanu, PJ Heard, J Das, S Degroote, M Germain

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

Translated title of the contributionSurface charge lithography for GaN nano-scale device fabrication
Original languageEnglish
Title of host publication2nd International Workshop on FIB for Photonics, Cambridge, UK
Publication statusPublished - Apr 2010

Bibliographical note

Conference Organiser: IEEE

Structured keywords

  • CDTR

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