Switching of amorphous silicon thin-film actuators for optically functional robotic devices

C. Gillespie; A. Marzo; F. Scarpa; J. Rossiter; A. T. Conn

doi:10.1117/12.2558175

Switching of amorphous silicon thin-film actuators for optically functional robotic devices

C. Gillespie, A. Marzo, F. Scarpa, J. Rossiter, A. T. Conn

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

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Abstract

In this paper, we develop and characterise the use of amorphous Silicon as an optically functional material in actuated devices. A novel actuator is developed which uses thin amorphous silicon film deposited on a polyimide substrate using Plasma Enhanced Chemical Vapour Deposition (PECVD). The actuator generates an active stroke via electrostatic attraction which causes the electrodes to “zip” together. The magnitude of displacement is controlled by exploiting the light-dependant resistance of an amorphous silicon (a-Si) photoreceptor integrated onto the actuator. An 8mm long actuator was prototyped and curvature changes were measured using image processing techniques to track the amorphous silicon electrode during actuation. A change of radius of 1mm was found between the ambient (22 Lux) and illuminated states (36 kLux) with an applied voltage of 5 kV.

Original language	English
Title of host publication	Proceedings of the SPIE, Electroactive Polymer Actuators and Devices (EAPAD) XXII
Publisher	Society of Photo-Optical Instrumentation Engineers (SPIE)
Volume	11375
DOIs	https://doi.org/10.1117/12.2558175
Publication status	Published - 26 Apr 2020
Event	SPIE Smart Structures + Nondestructive Evaluation - Online Duration: 27 Apr 2020 → 8 May 2020 https://spie.org/conferences-and-exhibitions/smart-structures/nde?SSO=1

Conference

Conference	SPIE Smart Structures + Nondestructive Evaluation
Period	27/04/20 → 8/05/20
Internet address	https://spie.org/conferences-and-exhibitions/smart-structures/nde?SSO=1

Bibliographical note

Acceptance date is provisional and based on date of publication.

Keywords

amorphous silicon
actuator
compliant actuators
optically functional
thin films

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Gillespie, C., Marzo, A., Scarpa, F., Rossiter, J., & Conn, A. T. (2020). Switching of amorphous silicon thin-film actuators for optically functional robotic devices. In Proceedings of the SPIE, Electroactive Polymer Actuators and Devices (EAPAD) XXII (Vol. 11375). [113751O (2020)] Society of Photo-Optical Instrumentation Engineers (SPIE). https://doi.org/10.1117/12.2558175

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title = "Switching of amorphous silicon thin-film actuators for optically functional robotic devices",

abstract = "In this paper, we develop and characterise the use of amorphous Silicon as an optically functional material in actuated devices. A novel actuator is developed which uses thin amorphous silicon film deposited on a polyimide substrate using Plasma Enhanced Chemical Vapour Deposition (PECVD). The actuator generates an active stroke via electrostatic attraction which causes the electrodes to “zip” together. The magnitude of displacement is controlled by exploiting the light-dependant resistance of an amorphous silicon (a-Si) photoreceptor integrated onto the actuator. An 8mm long actuator was prototyped and curvature changes were measured using image processing techniques to track the amorphous silicon electrode during actuation. A change of radius of 1mm was found between the ambient (22 Lux) and illuminated states (36 kLux) with an applied voltage of 5 kV.",

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author = "C. Gillespie and A. Marzo and F. Scarpa and J. Rossiter and Conn, {A. T.}",

note = "Acceptance date is provisional and based on date of publication.; SPIE Smart Structures + Nondestructive Evaluation ; Conference date: 27-04-2020 Through 08-05-2020",

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Gillespie, C, Marzo, A, Scarpa, F , Rossiter, J & Conn, AT 2020, Switching of amorphous silicon thin-film actuators for optically functional robotic devices. in Proceedings of the SPIE, Electroactive Polymer Actuators and Devices (EAPAD) XXII. vol. 11375, 113751O (2020), Society of Photo-Optical Instrumentation Engineers (SPIE), SPIE Smart Structures + Nondestructive Evaluation, 27/04/20. https://doi.org/10.1117/12.2558175

Switching of amorphous silicon thin-film actuators for optically functional robotic devices. / Gillespie, C.; Marzo, A.; Scarpa, F.; Rossiter, J.; Conn, A. T.

Proceedings of the SPIE, Electroactive Polymer Actuators and Devices (EAPAD) XXII. Vol. 11375 Society of Photo-Optical Instrumentation Engineers (SPIE), 2020. 113751O (2020).

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

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AU - Marzo, A.

AU - Scarpa, F.

AU - Rossiter, J.

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N1 - Acceptance date is provisional and based on date of publication.

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AB - In this paper, we develop and characterise the use of amorphous Silicon as an optically functional material in actuated devices. A novel actuator is developed which uses thin amorphous silicon film deposited on a polyimide substrate using Plasma Enhanced Chemical Vapour Deposition (PECVD). The actuator generates an active stroke via electrostatic attraction which causes the electrodes to “zip” together. The magnitude of displacement is controlled by exploiting the light-dependant resistance of an amorphous silicon (a-Si) photoreceptor integrated onto the actuator. An 8mm long actuator was prototyped and curvature changes were measured using image processing techniques to track the amorphous silicon electrode during actuation. A change of radius of 1mm was found between the ambient (22 Lux) and illuminated states (36 kLux) with an applied voltage of 5 kV.

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KW - actuator

KW - compliant actuators

KW - optically functional

KW - thin films

U2 - 10.1117/12.2558175

DO - 10.1117/12.2558175

M3 - Conference Contribution (Conference Proceeding)

VL - 11375

BT - Proceedings of the SPIE, Electroactive Polymer Actuators and Devices (EAPAD) XXII

PB - Society of Photo-Optical Instrumentation Engineers (SPIE)

T2 - SPIE Smart Structures + Nondestructive Evaluation

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