Abstract
A method of combined thin-film deposition, electron beam lithography, and ion milling is
presented for the fabrication of gold and silver nanostructures. The flexibility of lithographical
processes for the variation of geometric parameters is combined with three-dimensional control
over the surface evolution. Depending on the etching angle, different shapes ranging from cones
over rods to cups can be achieved. These size- and shape-tunable structures present a toolbox
for nano-optical investigations. As an example, optical properties of systematically varying
structures are examined in a parabolic mirror confocal microscope.
| Translated title of the contribution | Tailoring gold nano structures for near-field optical applications |
|---|---|
| Original language | English |
| Article number | 065301 |
| Number of pages | 7 |
| Journal | Nanotechnology |
| Volume | 21 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - Jan 2010 |