The chemistry of volatile waste from silicon wafer processing

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    Research output: Contribution to journalArticle (Academic Journal)

    19 Citations (Scopus)
    Translated title of the contributionThe chemistry of volatile waste from silicon wafer processing
    Original languageEnglish
    Pages (from-to)815 - 822
    JournalJournal of the Chemical Society: Dalton Transactions
    Publication statusPublished - 1999

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