| Translated title of the contribution | The chemistry of volatile waste from silicon wafer processing |
|---|---|
| Original language | English |
| Pages (from-to) | 815 - 822 |
| Journal | Journal of the Chemical Society: Dalton Transactions |
| Publication status | Published - 1999 |
The chemistry of volatile waste from silicon wafer processing
PL Timms
Research output: Contribution to journal › Article (Academic Journal) › peer-review
22
Citations
(Scopus)