The cylindrical envelope projection model applied to SE images of curved surfaces and comparison with AFM evaluations

M Antognozzi*, U Valdre

*Corresponding author for this work

Research output: Contribution to journalArticle (Academic Journal)

Abstract

The Cylindrical Envelope Projection Model (CEPM) has been extended to images of curved objects (e.g, spheres), obtained in a SEM by means of SEs, in order to improve the accuracy of measurements (down to a few %). The test objects have been calibrated by means of an AFM equipped with home-made nanotips. A simple rule for measuring the diameter of spheres and cylinders from SE y-modulated traces is given. The rule is applicable to specimens of medium (Z greater than or equal to 25) and high atomic number.

Original languageEnglish
Pages (from-to)513-522
Number of pages10
JournalMicroscopy Microanalysis Microstructures
Volume6
Issue number5-6
Publication statusPublished - 1995
EventWorkshop on Microstructural and Microanalytical Techniques in Materials Science - LECCE, Italy
Duration: 23 Feb 199524 Feb 1995

Keywords

  • SECONDARY

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