The Cylindrical Envelope Projection Model (CEPM) has been extended to images of curved objects (e.g, spheres), obtained in a SEM by means of SEs, in order to improve the accuracy of measurements (down to a few %). The test objects have been calibrated by means of an AFM equipped with home-made nanotips. A simple rule for measuring the diameter of spheres and cylinders from SE y-modulated traces is given. The rule is applicable to specimens of medium (Z greater than or equal to 25) and high atomic number.
|Number of pages||10|
|Journal||Microscopy Microanalysis Microstructures|
|Publication status||Published - 1995|
|Event||Workshop on Microstructural and Microanalytical Techniques in Materials Science - LECCE, Italy|
Duration: 23 Feb 1995 → 24 Feb 1995