Abstract
The Cylindrical Envelope Projection Model (CEPM) has been extended to images of curved objects (e.g, spheres), obtained in a SEM by means of SEs, in order to improve the accuracy of measurements (down to a few %). The test objects have been calibrated by means of an AFM equipped with home-made nanotips. A simple rule for measuring the diameter of spheres and cylinders from SE y-modulated traces is given. The rule is applicable to specimens of medium (Z greater than or equal to 25) and high atomic number.
Original language | English |
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Pages (from-to) | 513-522 |
Number of pages | 10 |
Journal | Microscopy Microanalysis Microstructures |
Volume | 6 |
Issue number | 5-6 |
Publication status | Published - 1995 |
Event | Workshop on Microstructural and Microanalytical Techniques in Materials Science - LECCE, Italy Duration: 23 Feb 1995 → 24 Feb 1995 |
Keywords
- SECONDARY