The Effect of Ion Energy on the Deposition of Amorphous Carbon Phosphide Films

Sean Pearce, J Filik, PW May, RK Wild, KR Hallam, PJ Heard

Research output: Contribution to journalArticle (Academic Journal)peer-review

15 Citations (Scopus)
Translated title of the contributionThe Effect of Ion Energy on the Deposition of Amorphous Carbon Phosphide Films
Original languageEnglish
Pages (from-to)979 - 982
Number of pages4
JournalDiamond and Related Materials
Volume12
DOIs
Publication statusPublished - 2003

Bibliographical note

Publisher: ELSEVIER SCIENCE SA, LAUSANNE
Name and Venue of Conference: 13th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide, Granada, Spain
Conference Organiser: Elsevier

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