The Effect of Ion Energy on the Deposition of Amorphous Carbon Phosphide Films

Sean Pearce; J Filik; PW May; RK Wild; KR Hallam; PJ Heard

doi:10.1016/S0925-9635(02)00371-0

The Effect of Ion Energy on the Deposition of Amorphous Carbon Phosphide Films

Sean Pearce, J Filik, PW May, RK Wild, KR Hallam, PJ Heard

Research output: Contribution to journal › Article (Academic Journal) › peer-review

15 Citations (Scopus)

Translated title of the contribution	The Effect of Ion Energy on the Deposition of Amorphous Carbon Phosphide Films
Original language	English
Pages (from-to)	979 - 982
Number of pages	4
Journal	Diamond and Related Materials
Volume	12
DOIs	https://doi.org/10.1016/S0925-9635(02)00371-0
Publication status	Published - 2003

Bibliographical note

Publisher: ELSEVIER SCIENCE SA, LAUSANNE
Name and Venue of Conference: 13th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide, Granada, Spain
Conference Organiser: Elsevier

Access to Document

10.1016/S0925-9635(02)00371-0

Cite this

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title = "The Effect of Ion Energy on the Deposition of Amorphous Carbon Phosphide Films",

author = "Sean Pearce and J Filik and PW May and RK Wild and KR Hallam and PJ Heard",

note = "Publisher: ELSEVIER SCIENCE SA, LAUSANNE Name and Venue of Conference: 13th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide, Granada, Spain Conference Organiser: Elsevier",

year = "2003",

doi = "10.1016/S0925-9635(02)00371-0",

language = "English",

volume = "12",

pages = "979 -- 982",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier",

}

TY - JOUR

T1 - The Effect of Ion Energy on the Deposition of Amorphous Carbon Phosphide Films

AU - Pearce, Sean

AU - Filik, J

AU - May, PW

AU - Wild, RK

AU - Hallam, KR

AU - Heard, PJ

N1 - Publisher: ELSEVIER SCIENCE SA, LAUSANNE Name and Venue of Conference: 13th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide, Granada, Spain Conference Organiser: Elsevier

PY - 2003

Y1 - 2003

U2 - 10.1016/S0925-9635(02)00371-0

DO - 10.1016/S0925-9635(02)00371-0

M3 - Article (Academic Journal)

VL - 12

SP - 979

EP - 982

JO - Diamond and Related Materials

JF - Diamond and Related Materials

SN - 0925-9635

ER -