The effect of water desorption and organosilane coupling agents on the adhesion of poly(p-xylylene) films to a silicon wafer surface

PK Lightfoot, J Stejny

Research output: Contribution to journalArticle (Academic Journal)peer-review

3 Citations (Scopus)
Translated title of the contributionThe effect of water desorption and organosilane coupling agents on the adhesion of poly(p-xylylene) films to a silicon wafer surface
Original languageEnglish
Pages (from-to)581 - 586
JournalJournal of Materials Science: Materials in Electronics
Volume12
Publication statusPublished - 2001

Bibliographical note

Publisher: Kluwer Academic Publishers

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