The fabrication of atomic-scale devices in silicon

MY Simmons, SR Schofield, L Oberbeck, NJ Curson, JL O'Brien, T Hallam, Frank J Ruess, J Goh, G Clark

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

Translated title of the contributionThe fabrication of atomic-scale devices in silicon
Original languageEnglish
Title of host publicationUS-Australia Workshop on Solid State and Optical Approaches to Quantum Computing, Sydney, Australia
Publication statusPublished - Jan 2003

Cite this

Simmons, MY., Schofield, SR., Oberbeck, L., Curson, NJ., O'Brien, JL., Hallam, T., Ruess, F. J., Goh, J., & Clark, G. (2003). The fabrication of atomic-scale devices in silicon. In US-Australia Workshop on Solid State and Optical Approaches to Quantum Computing, Sydney, Australia