The fabrication of atomic-scale devices in silicon

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

Translated title of the contribution	The fabrication of atomic-scale devices in silicon
Original language	English
Title of host publication	US-Australia Workshop on Solid State and Optical Approaches to Quantum Computing, Sydney, Australia
Publication status	Published - Jan 2003

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@inproceedings{ac6b6948f42844e1a6cf59e6943a666e,

title = "The fabrication of atomic-scale devices in silicon",

author = "MY Simmons and SR Schofield and L Oberbeck and NJ Curson and JL O'Brien and T Hallam and Ruess, \{Frank J\} and J Goh and G Clark",

year = "2003",

month = jan,

language = "English",

booktitle = "US-Australia Workshop on Solid State and Optical Approaches to Quantum Computing, Sydney, Australia",

}

TY - GEN

T1 - The fabrication of atomic-scale devices in silicon

AU - Simmons, MY

AU - Schofield, SR

AU - Oberbeck, L

AU - Curson, NJ

AU - O'Brien, JL

AU - Hallam, T

AU - Ruess, Frank J

AU - Goh, J

AU - Clark, G

PY - 2003/1

Y1 - 2003/1

M3 - Conference Contribution (Conference Proceeding)

BT - US-Australia Workshop on Solid State and Optical Approaches to Quantum Computing, Sydney, Australia

ER -