Translated title of the contribution | The formation of porous silicon |
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Original language | English |
Title of host publication | Semiconductor micromachining: volume 1 |
Editors | SA Campbell, HJ Lewerenz |
Publisher | Wiley |
Pages | 278 - 308 |
ISBN (Print) | 047190846 |
Publication status | Published - 1998 |
The formation of porous silicon
DJ Riley
Research output: Chapter in Book/Report/Conference proceeding › Chapter in a book