The growth of gallium nitride films produced by reactive sputtering at low temperatures

WT Young, SRP Silva, M Benyoucef, MHH Kuball, JV Anguita, JM Shannon, KP Homewood, BJ Sealy

Research output: Contribution to journalArticle (Academic Journal)peer-review

8 Citations (Scopus)
Translated title of the contributionThe growth of gallium nitride films produced by reactive sputtering at low temperatures
Original languageEnglish
Pages (from-to)319 - 322
Journalphysica status solidi (a)
Volume176
Publication statusPublished - 1999

Bibliographical note

Publisher: Wiley-VCH

Structured keywords

  • CDTR

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