The growth of gallium nitride films produced by reactive sputtering at low temperatures

WT Young, SRP Silva, M Benyoucef, MHH Kuball, JV Anguita, JM Shannon, KP Homewood, BJ Sealy

Research output: Contribution to journal › Article (Academic Journal) › peer-review

8 Citations (Scopus)

Translated title of the contribution	The growth of gallium nitride films produced by reactive sputtering at low temperatures
Original language	English
Pages (from-to)	319 - 322
Journal	physica status solidi (a)
Volume	176
Publication status	Published - 1999

Publisher: Wiley-VCH

Research Groups and Themes

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title = "The growth of gallium nitride films produced by reactive sputtering at low temperatures",

author = "WT Young and SRP Silva and M Benyoucef and MHH Kuball and JV Anguita and JM Shannon and KP Homewood and BJ Sealy",

note = "Publisher: Wiley-VCH",

year = "1999",

language = "English",

volume = "176",

pages = "319 -- 322",

journal = "physica status solidi (a)",

issn = "1862-6319",

publisher = "Wiley-VCH Verlag",

}

TY - JOUR

T1 - The growth of gallium nitride films produced by reactive sputtering at low temperatures

AU - Young, WT

AU - Silva, SRP

AU - Benyoucef, M

AU - Kuball, MHH

AU - Anguita, JV

AU - Shannon, JM

AU - Homewood, KP

AU - Sealy, BJ

N1 - Publisher: Wiley-VCH

PY - 1999

Y1 - 1999

M3 - Article (Academic Journal)

SN - 1862-6319

VL - 176

SP - 319

EP - 322

JO - physica status solidi (a)

JF - physica status solidi (a)

ER -