The Nanolithography Toolbox

Krishna C. Balram, Daron A. Westly, Marcelo Davanço, Karen E. Grutter, Qing Li, Thomas Michels, Christopher H. Ray, Liya Yu, Richard J. Kasica, Christopher B. Wallin, Ian J. Gilbert, Brian A. Bryce, Gregory Simelgor, Juraj Topolancik, Nicolae Lobontiu, Yuxiang Liu, Pavel Neuzil, Vojtech Svatos, Kristen A. Dill, Neal A. BertrandMeredith G. Metzler, Gerald Lopez, David A. Czaplewski, Leonidas Ocola, Kartik A. Srinivasan, Samuel M. Stavis, Vladimir A. Aksyuk, J. Alexander Liddle, Slava Krylov, B. Robert Ilic

Research output: Contribution to journalArticle (Academic Journal)peer-review

36 Citations (Scopus)
337 Downloads (Pure)

Abstract

This article introduces in archival form the Nanolithography Toolbox, a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST) developed the Nanolithography Toolbox to help users of the CNST NanoFab design devices with complex curves and aggressive critical dimensions. Using parameterized shapes as building blocks, the Nanolithography Toolbox allows users to rapidly design and layout nanoscale devices of arbitrary complexity through scripting and programming. The Toolbox offers many parameterized shapes, including structure libraries for micro- and nanoelectromechanical systems (MEMS and NEMS) and nanophotonic devices. Furthermore, the Toolbox allows users to precisely define the number of vertices for each shape or create vectorized shapes using Bezier curves. Parameterized control allows users to design smooth curves with complex shapes. The Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices.
Original languageEnglish
Pages (from-to)464-475
Number of pages12
JournalJournal of Research of the National Institute of Standards and Technology
Volume121
DOIs
Publication statusPublished - 19 Oct 2016

Keywords

  • CAD
  • Lithography
  • Nanofabrication
  • Nanofluidic
  • Nanophotonic
  • Nanoplasmonic
  • Nanoscale curved features
  • Nanoscale design
  • Nanoscale devices

Fingerprint Dive into the research topics of 'The Nanolithography Toolbox'. Together they form a unique fingerprint.

Cite this