The Nanolithography Toolbox

Krishna C. Balram, Daron A. Westly, Marcelo Davanço, Karen E. Grutter, Qing Li, Thomas Michels, Christopher H. Ray, Liya Yu, Richard J. Kasica, Christopher B. Wallin, Ian J. Gilbert, Brian A. Bryce, Gregory Simelgor, Juraj Topolancik, Nicolae Lobontiu, Yuxiang Liu, Pavel Neuzil, Vojtech Svatos, Kristen A. Dill, Neal A. BertrandMeredith G. Metzler, Gerald Lopez, David A. Czaplewski, Leonidas Ocola, Kartik A. Srinivasan, Samuel M. Stavis, Vladimir A. Aksyuk, J. Alexander Liddle, Slava Krylov, B. Robert Ilic

Research output: Contribution to journalArticle (Academic Journal)peer-review

36 Citations (Scopus)
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Physics & Astronomy