The oriented growth of ZnO films on NaCl substrates by pulsed laser ablation

SJ Henley, MNR Ashfold, D Cherns

Research output: Contribution to journalArticle (Academic Journal)peer-review

32 Citations (Scopus)

Abstract

The structure of ZnO thin films grown by 193-nm pulsed laser ablation (PLA) of a ZnO target in a low background pressure of O2 on (001) NaCl substrates was examined using selected-area electron diffraction (SAED) in a transmission electron microscope (TEM). Samples were grown at different substrate temperatures in the range 20–300 °C. All samples were polycrystalline with the wurtzite crystal structure. Samples deposited at 20 °C had a polar (0002) texture. At higher substrate temperatures oriented growth was observed with diffraction patterns showing four-fold symmetry. These patterns can be explained by a combination of - and -oriented grains, the alignment of which can be rationalised in terms of epitaxy with the surface of the NaCl substrate.
Translated title of the contributionThe oriented growth of ZnO films on NaCl substrates by pulsed laser ablation
Original languageEnglish
Pages (from-to)69 - 72
Number of pages4
JournalThin Solid Films
Volume422
Publication statusPublished - 2002

Bibliographical note

Publisher: Elsevier Science

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