Translated title of the contribution | The recrystallization of ion-implanted silicon layers |
---|---|
Original language | English |
Article number | 1-2 |
Pages (from-to) | 55 - 66 |
Journal | Radiation Effects |
Volume | 32 |
Publication status | Published - 1977 |
The recrystallization of ion-implanted silicon layers
JR Brawn
Research output: Contribution to journal › Article (Academic Journal) › peer-review
20
Citations
(Scopus)