The recrystallization of ion-implanted silicon layers

JR Brawn

Research output: Contribution to journalArticle (Academic Journal)peer-review

20 Citations (Scopus)
Translated title of the contributionThe recrystallization of ion-implanted silicon layers
Original languageEnglish
Article number1-2
Pages (from-to)55 - 66
JournalRadiation Effects
Volume32
Publication statusPublished - 1977

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