The role of inert gas in MW-enhanced plasmas for the deposition of nanocrystalline diamond thin films

OJL Fox, J Ma, PW May, MNR Ashfold, YA Mankelevich

Research output: Contribution to journalArticle (Academic Journal)peer-review

24 Citations (Scopus)
Translated title of the contributionThe role of inert gas in MW-enhanced plasmas for the deposition of nanocrystalline diamond thin films
Original languageEnglish
Pages (from-to)750 - 758
JournalDiamond & Related Materials
Volume18
DOIs
Publication statusPublished - 2009

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