The role of inert gas in MW-enhanced plasmas for the deposition of nanocrystalline diamond thin films

OJL Fox, J Ma, PW May, MNR Ashfold, YA Mankelevich

Research output: Contribution to journal › Article (Academic Journal) › peer-review

24 Citations (Scopus)

Translated title of the contribution	The role of inert gas in MW-enhanced plasmas for the deposition of nanocrystalline diamond thin films
Original language	English
Pages (from-to)	750 - 758
Journal	Diamond & Related Materials
Volume	18
DOIs	https://doi.org/10.1016/j.diamond.2009.01.004
Publication status	Published - 2009

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title = "The role of inert gas in MW-enhanced plasmas for the deposition of nanocrystalline diamond thin films",

author = "OJL Fox and J Ma and PW May and MNR Ashfold and YA Mankelevich",

year = "2009",

doi = "10.1016/j.diamond.2009.01.004",

language = "English",

volume = "18",

pages = "750 -- 758",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier",

}

TY - JOUR

T1 - The role of inert gas in MW-enhanced plasmas for the deposition of nanocrystalline diamond thin films

AU - Fox, OJL

AU - Ma, J

AU - May, PW

AU - Ashfold, MNR

AU - Mankelevich, YA

PY - 2009

Y1 - 2009

U2 - 10.1016/j.diamond.2009.01.004

DO - 10.1016/j.diamond.2009.01.004

M3 - Article (Academic Journal)

VL - 18

SP - 750

EP - 758

JO - Diamond and Related Materials

JF - Diamond and Related Materials

SN - 0925-9635

ER -