Translated title of the contribution | The role of inert gas in MW-enhanced plasmas for the deposition of nanocrystalline diamond thin films |
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Original language | English |
Pages (from-to) | 750 - 758 |
Journal | Diamond & Related Materials |
Volume | 18 |
DOIs | |
Publication status | Published - 2009 |
The role of inert gas in MW-enhanced plasmas for the deposition of nanocrystalline diamond thin films
OJL Fox, J Ma, PW May, MNR Ashfold, YA Mankelevich
Research output: Contribution to journal › Article (Academic Journal) › peer-review
25
Citations
(Scopus)