The role of inert gas in MW-enhanced plasmas for the deposition of nanocrystalline diamond thin films

OJL Fox; J Ma; PW May; MNR Ashfold; YA Mankelevich

doi:10.1016/j.diamond.2009.01.004

The role of inert gas in MW-enhanced plasmas for the deposition of nanocrystalline diamond thin films

OJL Fox
, J Ma
, PW May
, MNR Ashfold
, YA Mankelevich

Research output: Contribution to journal › Article (Academic Journal) › peer-review

26 Citations (Scopus)

Original language	English
Pages (from-to)	750 - 758
Journal	Diamond & Related Materials
Volume	18
DOIs	https://doi.org/10.1016/j.diamond.2009.01.004
Publication status	Published - 2009

Research Groups and Themes

Physical & Theoretical

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10.1016/j.diamond.2009.01.004

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DEVELOPMENT OF DIAMOND DYNODES
May, P. W. (Principal Investigator)
1/03/07 → 1/03/08
Project: Research
MOLECULAR BEAM MASS SPECTROMETRY OF MICROWAVE ACTIVATED PLASMAS
May, P. W. (Principal Investigator)
1/09/06 → 1/09/10
Project: Research

Cite this

@article{3c94b6e6b1a34f38b3c92ef0a888accc,

title = "The role of inert gas in MW-enhanced plasmas for the deposition of nanocrystalline diamond thin films",

author = "OJL Fox and J Ma and PW May and MNR Ashfold and YA Mankelevich",

year = "2009",

doi = "10.1016/j.diamond.2009.01.004",

language = "English",

volume = "18",

pages = "750 -- 758",

journal = "Diamond \& Related Materials",

issn = "0925-9635",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - The role of inert gas in MW-enhanced plasmas for the deposition of nanocrystalline diamond thin films

AU - Fox, OJL

AU - Ma, J

AU - May, PW

AU - Ashfold, MNR

AU - Mankelevich, YA

PY - 2009

Y1 - 2009

U2 - 10.1016/j.diamond.2009.01.004

DO - 10.1016/j.diamond.2009.01.004

M3 - Article (Academic Journal)

SN - 0925-9635

VL - 18

SP - 750

EP - 758

JO - Diamond & Related Materials

JF - Diamond & Related Materials

ER -

The role of inert gas in MW-enhanced plasmas for the deposition of nanocrystalline diamond thin films

Research Groups and Themes

Access to Document

Handle.net

Projects

DEVELOPMENT OF DIAMOND DYNODES

MOLECULAR BEAM MASS SPECTROMETRY OF MICROWAVE ACTIVATED PLASMAS

Cite this