Translated title of the contribution | Thick crack-free AlGaN films deposited by facet-controlled epitaxial lateral overgrowth |
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Original language | English |
Title of host publication | 5th Int. Conf. on Nitride Semiconductors (ICNS-5), Nara, Japan May 2003 |
Editors | M Stutzmann |
Publisher | Wiley-VCH Verlag |
Pages | 2136 - 2140 |
Number of pages | 5 |
ISBN (Print) | 3527404899 |
Publication status | Published - 2003 |
Bibliographical note
Conference Proceedings/Title of Journal: 5th Int. Conf. on Nitride Semiconductors (ICNS-5) Conference ProceedingsConference Organiser: Japan Soc. Appl. Phys