Thick crack-free AlGaN films deposited by facet-controlled epitaxial lateral overgrowth

R Liu, A Bell, FA Ponce, H Amano, I Akasaki, D Cherns

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

11 Citations (Scopus)
Translated title of the contributionThick crack-free AlGaN films deposited by facet-controlled epitaxial lateral overgrowth
Original languageEnglish
Title of host publication5th Int. Conf. on Nitride Semiconductors (ICNS-5), Nara, Japan May 2003
EditorsM Stutzmann
PublisherWiley-VCH Verlag
Pages2136 - 2140
Number of pages5
ISBN (Print)3527404899
Publication statusPublished - 2003

Bibliographical note

Conference Proceedings/Title of Journal: 5th Int. Conf. on Nitride Semiconductors (ICNS-5) Conference Proceedings
Conference Organiser: Japan Soc. Appl. Phys

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