Abstract
The trend of miniaturization and rapid progress in the cost-competitive microelectronic industry require high resolution, fast, accurate and cost-effective thermal characterization techniques. These techniques aid the assessment of reliability and performance benchmarking of new device designs for the realistic operation conditions. We present a time resolved, surface sensitive, sub-micron resolution wide field thermal imaging technique, exploiting fast radiative recombination rates of quantum rod photoluminescence to probe temperature transients in semiconductor devices. We demonstrate a time resolution of 20 s on a single finger AlGaN/GaN HEMT. This technique provides an image of the surface temperature transients regardless of the device design/material system under test. The results were verified with transient thermo-reflectance measurements.
Original language | English |
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Journal | IEEE Electron Device Letters |
Early online date | 23 Apr 2020 |
DOIs | |
Publication status | E-pub ahead of print - 23 Apr 2020 |
Research Groups and Themes
- CDTR
Keywords
- GaN HEMT
- hyperspectral quantum rod thermography
- thermal metrology
- transient self-heating