Abstract
Turn-on voltage instability of beta-gallium oxide ( β -Ga2O3) vertical trench Schottky barrier diodes (SBDs) with different fin-channel orientations was investigated. Fins oriented along the [010] direction exhibited the highest turn-on voltage stability and the smallest hysteresis, while fin channels oriented along the [100] direction exhibited the greatest instability. This study suggests that charge trapping at the sidewalls of β -Ga2O3 trench SBDs differs based on the fin channel orientation and that fin channels oriented along the [010] direction possess the best electrical characteristics and reliability.
| Original language | English |
|---|---|
| Pages (from-to) | 3609 - 3613 |
| Number of pages | 5 |
| Journal | IEEE Transactions on Electron Devices |
| Volume | 71 |
| Issue number | 6 |
| Early online date | 2 May 2024 |
| DOIs | |
| Publication status | Published - 1 Jun 2024 |
Research Groups and Themes
- CDTR
Keywords
- Charge trapping
- gallium oxide
- instability
- power device
- Schottky barrier diode (SBD)
- turn-on voltage