Validating optical emission spectroscopy as a diagnostic of microwave activated CH4/Ar/H2 plasmas used for diamond chemical vapor deposition

J. Ma, M.N.R Ashfold, Y.A Mankelevich

Research output: Contribution to journalArticle (Academic Journal)peer-review

93 Citations (Scopus)
Translated title of the contributionValidating optical emission spectroscopy as a diagnostic of microwave activated CH4/Ar/H2 plasmas used for diamond chemical vapor deposition
Original languageEnglish
Article number043302
Number of pages12
JournalJournal of Applied Physics
Volume105
Issue number4
DOIs
Publication statusPublished - Feb 2009

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