| Translated title of the contribution | Validating optical emission spectroscopy as a diagnostic of microwave activated CH4/Ar/H2 plasmas used for diamond chemical vapor deposition |
|---|---|
| Original language | English |
| Article number | 043302 |
| Number of pages | 12 |
| Journal | Journal of Applied Physics |
| Volume | 105 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - Feb 2009 |
Validating optical emission spectroscopy as a diagnostic of microwave activated CH4/Ar/H2 plasmas used for diamond chemical vapor deposition
J. Ma, M.N.R Ashfold, Y.A Mankelevich
Research output: Contribution to journal › Article (Academic Journal) › peer-review
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