Abstract
The micro g/Hz mass sensitivity of a macro-scale PZT bimorph cantilever has been measured by using a vibration-excitation method in its second mode of resonance by using experimental and numerical methods.
Original language | English |
---|---|
Title of host publication | 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings |
Place of Publication | Singapore, Singapore |
Publisher | IEEE Computer Society |
ISBN (Electronic) | 9781509010356 |
DOIs | |
Publication status | Published - 13 Sep 2016 |
Event | 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, Singapore Duration: 31 Jul 2016 → 4 Aug 2016 |
Publication series
Name | International Conference on Optical MEMS and Nanophotonics |
---|---|
Volume | 2016-September |
ISSN (Print) | 2160-5033 |
ISSN (Electronic) | 2160-5041 |
Conference
Conference | 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 |
---|---|
Country | Singapore |
City | Singapore |
Period | 31/07/16 → 4/08/16 |
Bibliographical note
Publisher Copyright:© 2016 IEEE.
Copyright:
Copyright 2017 Elsevier B.V., All rights reserved.
Keywords
- mass sensitivity
- numerical and experimental
- PZT bimorph cantilever
- second mode resonance
- vibration-excitation